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1

Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process

Ü. Sökmen, A. Stranz, S. Fündling, S. Merzsch, R. Neumann, H.-H. Wehmann, E. Peiner, A. Waag

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 969 KB

english, 2010

2

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Hamdana, Gerry, Puranto, Prabowo, Langfahl-Klabes, Jannick, Li, Zhi, Pohlenz, Frank, Xu, Min, Granz, Tony, Bertke, Maik, Wasisto, Hutomo Suryo, Brand, Uwe, Peiner, Erwin

Journal:

Sensors and Actuators A: Physical

Year:

2018

Language:

english

File:

PDF, 2.58 MB

english, 2018

3

Form measurement inside fuel injector nozzle spray holes

Erwin Peiner, Michael Balke, Lutz Doering

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 325 KB

english, 2009

4

Micromachined resonator for cavitation sensing

E Peiner, R Mikuta, T Iwert, H Fritsch, P Hauptmann, K Fricke, A Schlachetzki

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.27 MB

english, 1999

5

Nanowire silicon as a material for thermoelectric energy conversion

A. Stranz, J. Kähler, S. Merzsch, A. Waag, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 385 KB

english, 2012

6

Pick-and-Place Silver Sintering Die Attach of Small-Area Chips

Kahler, J., Heuck, N., Stranz, A., Waag, A., Peiner, E.

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2012

Language:

english

File:

PDF, 1.40 MB

english, 2012

7

Sintering of Copper Particles for Die Attach

Kahler, Julian, Heuck, Nicolas, Wagner, Alexander, Stranz, Andrej, Peiner, Erwin, Waag, Andreas

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2012

Language:

english

File:

PDF, 867 KB

english, 2012

8

[IEEE 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Paris, France (2018.7.8-2018.7.13)] 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Small Force Metrology for AFM, Stylus Instruments, CMM and Nanoindenter

Brand, U., Li, Z., Popadic, R., Hiller, K., Hahn, S., Frank, T., Hamdana, G., Peiner, E., Gartner, E., Fruhauf, J., Nesterov, V.

Year:

2018

Language:

english

File:

PDF, 453 KB

english, 2018

9

Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform

Li, Zhi, Gao, Sai, Brand, Uwe, Hiller, Karla, Hahn, Susann, Hamdana, Gerry, Peiner, Erwin, Wolff, Helmut, Bergmann, Detlef

Journal:

Year:

2019

Language:

english

File:

PDF, 5.56 MB

english, 2019

10

Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting

Nyangâau, Wilson Ombati, Setiono, Andi, Schmidt, Angelika, Bosse, Harald, Peiner, Erwin

Journal:

Year:

2020

File:

PDF, 7.23 MB

2020

11

Thickness control of InP and In0.53 Ga0.47 As thin films by energy-dispersive X-ray spectrometry

E. Peiner, K. Hansen, A. Schlachetzki

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 805 KB

english, 1995

12

Force calibration of stylus instruments using silicon microcantilevers

Erwin Peiner, Lutz Doering

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 519 KB

english, 2005

13

Micro force sensor with piezoresistive amorphous carbon strain gauge

E. Peiner, A. Tibrewala, R. Bandorf, S. Biehl, H. Lüthje, L. Doering

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 379 KB

english, 2006

14

Hetero-micromachining of epitaxial III/V compound semiconductors

Erwin Peiner, Klaus Fricke, Ingo Behrens, Andrey Bakin, Andreas Schlachetzki

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 490 KB

english, 2000

15

A low-frequency micromechanical resonant vibration sensor for wear monitoring

Holger Fritsch, Ralf Lucklum, Thomas Iwert, Peter Hauptmann, Dirk Scholz, Erwin Peiner, Andreas Schlachetzki

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 812 KB

english, 1997

16

A micromachined vibration sensor based on the control of power transmitted between optical fibres

E. Peiner, D. Scholz, A. Schlachetzki, P. Hauptmann

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 756 KB

english, 1998

17

Micromachined vibration sensor with on-chip circuitry and optical interconnects

E. Peiner, K. Fricke, D. Fehly, A. Schlachetzki, P. Hauptmann

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 907 KB

english, 1998

18

Fractures properties of InP microcantilevers by hetero-micromachining

K Fricke, E Peiner, M Chahoud, A Schlachetzki

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.41 MB

english, 1999

19

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 617 KB

english, 2008

20

A new micromachined sensor system for tactile measurements of high aspect ratio microstructures

M. Balke, E. Peiner, L. Doering

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 465 KB

english, 2008

21

MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes

Erwin Peiner, Lutz Doering

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 626 KB

english, 2010

22

Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

H. S. Wasisto, S. Merzsch, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 819 KB

english, 2012

23

Cleaning of structured templates from nanoparticle accumulation using silicone

S. Merzsch, H. S. Wasisto, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 866 KB

english, 2012

24

Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments

J. Kähler, A. Stranz, L. Doering, S. Merzsch, N. Heuck, A. Waag, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 846 KB

english, 2012

25

Measurements of thermoelectric properties of silicon pillars

A. Stranz, Ü. Sökmen, J. Kähler, A. Waag, E. Peiner

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 906 KB

english, 2011

26

Performance of InGaAs photodetectors: lateral p-n and p-n-p diodes

Klockenbrink, R., Peiner, E., Bartels, A., Wehmann, H.-H., Schlachetzki, A.

Journal:

IEEE Photonics Technology Letters

Year:

1995

Language:

english

File:

PDF, 373 KB

english, 1995

27

Performance of InGaAs metal-semiconductor-metal photodetectors on Si

Bartels, A., Peiner, E., Tang, G.-P., Klockenbrink, R., Wehmann, H.-H., Schlachetzki, A.

Journal:

IEEE Photonics Technology Letters

Year:

1996

Language:

english

File:

PDF, 348 KB

english, 1996

28

Thermoelectric Properties of High-Doped Silicon from Room Temperature to 900

Stranz, A., KÃ¤hler, J., Waag, A., Peiner, E.

Journal:

Journal of Electronic Materials

Year:

2013

Language:

english

File:

PDF, 411 KB

english, 2013

29

Piezoresistive cantilever as portable micro force calibration standard

Behrens, Ingo, Doering, Lutz, Peiner, Erwin

Journal:

Journal of Micromechanics and Microengineering

Year:

2003

Language:

english

File:

PDF, 363 KB

english, 2003

30

Electrical performance analysis and characterization of two port piezoelectric resonators

H. C. Qiu, P. Schwarz, D. Feili, S. Merzsch, E. Peiner…

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 501 KB

english, 2013

31

Production of vertical nanowire resonators by cryogenic-ICP–DRIE

Merzsch, S., Steib, F., Wasisto, H. S., Stranz, A., Hinze, P., Weimann, T., Peiner, E., Waag, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 867 KB

english, 2014

32

Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

Wasisto, Hutomo Suryo, Huang, Kai, Merzsch, Stephan, Stranz, Andrej, Waag, Andreas, Peiner, Erwin

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 994 KB

english, 2014

33

A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

Wasisto, Hutomo Suryo, Zhang, Qing, Merzsch, Stephan, Waag, Andreas, Peiner, Erwin

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 830 KB

english, 2014

34

Thermoelectric Coolers with Sintered Silver Interconnects

Kähler, Julian, Stranz, Andrej, Waag, Andreas, Peiner, Erwin

Journal:

Journal of Electronic Materials

Year:

2014

Language:

english

File:

PDF, 636 KB

english, 2014

35

[IEEE 2010 3rd Electronic System-Integration Technology Conference (ESTC) - Berlin, Germany (2010.09.13-2010.09.16)] 3rd Electronics System Integration Technology Conference ESTC - Die-attach for high-temperature applications using fineplacer-pressure-sintering (FPS)

Kahler, Julian, Heuck, Nicolas, Palm, Gerhard, Stranz, Andrej, Waag, Andreas, Peiner, Erwin

Year:

2010

Language:

english

File:

PDF, 829 KB

english, 2010

36

Nondestructive Evaluation of Diesel Spray Holes Using Piezoresistive Sensors

Peiner, Erwin, Doering, Lutz

Journal:

IEEE Sensors Journal

Year:

2013

Language:

english

File:

PDF, 3.17 MB

english, 2013

37

Microelectromechanical vibration sensor with optical interconnects

Peiner, E., Scholz, D., Fricke, K., Schlachetzki, A., Hauptmann, P.

Journal:

Journal of Microelectromechanical Systems

Year:

1998

Language:

english

File:

PDF, 137 KB

english, 1998

38

Slender Tactile Sensor for Contour and Roughness Measurements Within Deep and Narrow Holes

Peiner, Erwin, Balke, Michael, Doering, Lutz

Journal:

IEEE Sensors Journal

Year:

2008

Language:

english

File:

PDF, 1.04 MB

english, 2008

39

The effect of threading dislocations on optical absorption and electron scattering in strongly mismatched heteroepitaxial III V compound semiconductors on silicon

Peiner, Erwin, Guttzeit, Andreas, Wehmann, Hergo-Heiurich

Journal:

Journal of Physics Condensed Matter

Year:

2002

Language:

english

File:

PDF, 258 KB

english, 2002

40

Investigation of Thermoelectric Parameters of Bi2Te3: TEGs Assembled using Pressure-Assisted Silver Powder Sintering-Based Joining Technology

Stranz, Andrej, Waag, Andreas, Peiner, Erwin

Journal:

Journal of Electronic Materials

Year:

2015

Language:

english

File:

PDF, 770 KB

english, 2015

41

Thermal characterization of vertical silicon nanowires

Stranz, Andrej, Waag, Andreas, Peiner, Erwin

Journal:

Journal of Materials Research

Year:

2011

Language:

english

File:

PDF, 208 KB

english, 2011

42

SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Nanostructured silicon for thermoelectric

Stranz, A., Kähler, J., Waag, A., Peiner, E., Schmid, Ulrich, Sánchez-Rojas, José Luis, Leester-Schaedel, Monika

Year:

2011

Language:

english

File:

PDF, 5.62 MB

english, 2011

43

Packaging of MEMS and MOEMS for harsh environments

Kähler, Julian, Stranz, Andrej, Waag, Andreas, Peiner, Erwin

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 3.62 MB

english, 2012

44

Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures

Sökmen, Ü, Stranz, A, Fündling, S, Wehmann, H-H, Bandalo, V, Bora, A, Tornow, M, Waag, A, Peiner, E

Journal:

Journal of Micromechanics and Microengineering

Year:

2009

Language:

english

File:

PDF, 1.24 MB

english, 2009

45

Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

Wasisto, Hutomo Suryo, Merzsch, Stephan, Uhde, Erik, Waag, Andreas, Peiner, Erwin

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 1.89 MB

english, 2015

46

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Smart sensors and calibration standards for high precision metrology

Sánchez-Rojas, José Luis, Brama, Riccardo, Brand, Uwe, Gao, Sai, Doering, Lutz, Li, Zhi, Xu, Min, Buetefisch, Sebastian, Peiner, Erwin, Fruehauf, Joachim, Hiller, Karla

Year:

2015

Language:

english

File:

PDF, 2.55 MB

english, 2015

47

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments

Sánchez-Rojas, José Luis, Brama, Riccardo, Wasisto, Hutomo Suryo, Doering, Lutz, Daus, Alwin, Brand, Uwe, Frank, Thomas, Peiner, Erwin

Year:

2015

Language:

english

File:

PDF, 1.53 MB

english, 2015

48

SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V - Cleaning of nanopillar templates for nanoparticle collection using PDMS

Merzsch, S., Rodríguez-Vázquez, Ángel B., Adelung, Rainer, Wasisto, H. S., Waag, A., Carmona-Galán, Ricardo A., Liñán-Cembrano, Gustavo, Kirsch, I., Uhde, E., Ronning, Carsten, Salthammer, T., Peiner,

Year:

2011

Language:

english

File:

PDF, 6.59 MB

english, 2011

49

Double-meander spring silicon piezoresistive sensors as microforce calibration standards

Hamdana, Gerry, Wasisto, Hutomo Suryo, Doering, Lutz, Yan, Chunlei, Zhou, Lei, Brand, Uwe, Peiner, Erwin

Journal:

Optical Engineering

Year:

2016

Language:

english

File:

PDF, 4.46 MB

english, 2016

50

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 8 May 2017)] Smart Sensors, Actuators, and MEMS VIII - Comparison of methods for static charge energy harvesting on aircraft

Fonseca, Luis, Prunnila, Mika, Peiner, Erwin, Kiziroglou, M. E., Becker, Th., Yeatman, E. M., Schmid, U., Evans, J. W., Wright, P. K.

Year:

2017

Language:

english

File:

PDF, 411 KB

english, 2017